[5.22][RB751U-2HnD]flash CPU Usage is high

There is no disk operating CPU usage is high
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are you sending some traffic through the board when this is happening?
Maybe you are copying some file to to the router?
Try to disable/uninstall unneeded packages from the router to get some more free memory.

uninstall package
ipv6
routing

CPU Usage is 8%-15%